Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach

Tin Chih Toly Chen, Yu Cheng Wang*, Chi Wei Lin

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach'. Together they form a unique fingerprint.

Keyphrases

Engineering

Earth and Planetary Sciences

Chemical Engineering

Economics, Econometrics and Finance