Surface passivation of solar cells is investigated using CF 4 plasma treatment on low-temperature oxides to enhance the open-circuit voltage of the solar cells. Low-temperature oxides grown by a nitric acid solution are treated with the CF 4 plasma. Solar cells undergoing this scheme show an improved performance, including low-saturation current density and good quantum efficiency at short wavelengths. Experimental results demonstrate that the CF 4 plasma pretreatment on low-temperature oxides can significantly improve the open-circuit voltage, short-circuit current, and fill factor for silicon wafer-based solar cells. This technique is very promising for in-line solar cell manufacturing.
|Number of pages||3|
|Journal||IEEE Electron Device Letters|
|State||Published - 7 May 2013|
- CF plasma
- low-temperature oxides
- open-circuit voltage
- surface passivation