Enhancement of Ferroelectricity in 5 nm Metal-Ferroelectric-Insulator Technologies by Using a Strained TiN Electrode

Cheng Hung Wu, Kuan Chi Wang, Yu Yun Wang, Chenming Hu, Chun-Jung Su*, Tian-Li Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

Chemical Compounds