Enhancement of Ferroelectricity in 5-nm HZO Metal-Ferroelectric-Insulator-Semiconductor Technologies by Using Strained TiN Electrode

Cheng Hung Wu, Kuan Chi Wang, Yu Yun Wang, Tian-Li Wu*, Chun-Jung Su, Y. J. Lee, C. Hu

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

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Physics & Astronomy