Enhanced reliability and uniformity for Ge pMOSFET with low temperature supercritical fluid treatment
- Dun Bao Ruan
- , Kuei Shu Chang-Liao*
- , Ji Syuan Li
- , Bo Lien Kuo
- , Zi Qin Hong
- , Guan Ting Liu
- , Po Tsun Liu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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