Enhanced reliability and uniformity for Ge pMOSFET with low temperature supercritical fluid treatment

Dun Bao Ruan, Kuei Shu Chang-Liao*, Ji Syuan Li, Bo Lien Kuo, Zi Qin Hong, Guan Ting Liu, Po Tsun Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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