Enhanced piezocapacitive response in zinc oxide tetrapod-poly(dimethylsiloxane) composite dielectric layer for flexible and ultrasensitive pressure sensor

Gen Wen Hsieh*, Shih Rong Ling, Fan Ting Hung, Pei Hsiu Kao, Jian Bin Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We demonstrate polymeric piezocapacitive pressure sensors based on a novel composite dielectric film of poly(dimethylsiloxane) elastomeric silicone and zinc oxide tetrapod. With an appropriate loading of zinc oxide tetrapods, composite piezocapacitive pressure sensors show a 75-fold enhancement of pressure sensitivity over pristine devices, achieving a marked value as high as 2.55 kPa-1. The limit of detection was estimated to be about 10 mg, corresponding to a subtle stimulus of only 1.0 Pa. Besides, versatile functionalities such as detection of finger bending/straightening, calligraphy writing, and air flow blowing have been investigated. It is expected that the proposed piezocapacitive pressure sensors incorporating stress-sensitive additives of zinc oxide nanostructures may provide a promising means for potential applications in ultrasensitive wearable, healthcare systems and human-machine interfaces.

Original languageEnglish
Pages (from-to)6076-6086
Number of pages11
JournalNanoscale
Volume13
Issue number12
DOIs
StatePublished - 28 Mar 2021

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