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Enhanced performance of poly-Si thin film transistors using fluorine ions implantation
Chun Hao Tu*, Ting Chang Chang, Po-Tsun Liu, Hsiao-Wen Zan, Ya-Hsiang Tai, Che Yu Yang, Yung Chun Wu, Hsin Chou Liu, Wei Ren Chen, Chun Yen Chang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
21
Scopus
citations