Enhanced performance of poly-Si thin film transistors using fluorine ions implantation

Chun Hao Tu*, Ting Chang Chang, Po-Tsun Liu, Hsiao-Wen Zan, Ya-Hsiang Tai, Che Yu Yang, Yung Chun Wu, Hsin Chou Liu, Wei Ren Chen, Chun Yen Chang

*Corresponding author for this work

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