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Enhanced Performance for SiGe/Si Gate-All-Around Field-Effect-Transistor with Ge Condensation Using Supercritical Fluid Treatment
Wei Ren Chen, Dun Bao Ruan, Kuei Shu Chang-Liao*, Hao Yan Wang, Guang Li Luo, Yu Chuan Chiu, Ting Kai Kuan, Po Tsun Liu
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
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citations