TY - JOUR
T1 - Emission characteristics and control efficiency of acidic and basic gases and aerosols from packed towers
AU - Tsai, Chuen-Tinn
AU - Chang, Chang Tso
AU - Liu, Tsing Wei
AU - Huang, Chun Chao
AU - Chien, Chih Liang
AU - Chein, Hung Min
PY - 2004/1/1
Y1 - 2004/1/1
N2 -
Large amount of acidic liquids, such as H
2
SO
4
, HF, HCl and HNO
3
, and basic NH
3
liquid are used in high-tech industries in cleaning and etching processes in the Hsinchu Science-Based Industrial Park in Taiwan. The industries use packed towers (or scrubbers) to control emission of these inorganic pollutants, in which acidic gases but not particles are regulated by the Taiwan EPA's strict emission standard for semiconductor industry. To understand whether the emission standard is met and to investigate the emission rates, emission profiles, emission factors, and control efficiencies of various gaseous/aerosol species, measurement of pollutants before and after the packed towers was conducted using a sensitive porous metal sampler during January 2001 to February 2003. Results show that the pollutants are mainly in the gaseous phase, and the control efficiency of pollutants is low and variable when the inlet concentration is low. In addition to the control efficiency data, emission factors before the control device for various gas and particle species have also been developed for estimating the emission rates.
AB -
Large amount of acidic liquids, such as H
2
SO
4
, HF, HCl and HNO
3
, and basic NH
3
liquid are used in high-tech industries in cleaning and etching processes in the Hsinchu Science-Based Industrial Park in Taiwan. The industries use packed towers (or scrubbers) to control emission of these inorganic pollutants, in which acidic gases but not particles are regulated by the Taiwan EPA's strict emission standard for semiconductor industry. To understand whether the emission standard is met and to investigate the emission rates, emission profiles, emission factors, and control efficiencies of various gaseous/aerosol species, measurement of pollutants before and after the packed towers was conducted using a sensitive porous metal sampler during January 2001 to February 2003. Results show that the pollutants are mainly in the gaseous phase, and the control efficiency of pollutants is low and variable when the inlet concentration is low. In addition to the control efficiency data, emission factors before the control device for various gas and particle species have also been developed for estimating the emission rates.
KW - Acidic aerosols
KW - Air pollution control
KW - Emission factor
KW - Semiconductor manufacturing
UR - http://www.scopus.com/inward/record.url?scp=0346816625&partnerID=8YFLogxK
U2 - 10.1016/j.atmosenv.2003.10.002
DO - 10.1016/j.atmosenv.2003.10.002
M3 - Article
AN - SCOPUS:0346816625
SN - 1352-2310
VL - 38
SP - 643
EP - 646
JO - Atmospheric Environment
JF - Atmospheric Environment
IS - 4
ER -