Ellipsometric measurements and its alignment: Using the intensity ratio technique

Yu Faye Chao Yschao; Chi Shin Wei; Wen Chi Lee; Shy Chaung Lin; Tien-Sheng Chao

doi:10.1143/JJAP.34.5016

Ellipsometric measurements and its alignment: Using the intensity ratio technique

Yu Faye Chao Yschao, Chi Shin Wei, Wen Chi Lee, Shy Chaung Lin, Tien-Sheng Chao

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Using first-order treatment on azimuth errors of the polarizer (P) and analyzer (A) with respect to the plane of incidence (POI), we construct two intensity ratios around a certain configuration, such as P= ±п/4 and A = 0 as compared to A = п/2. These expressions can be used not only to align the azimuths of the polarizer and analyzer to the POI, but also to obtain the ellipsometric parameter Ψ without locating the minimum intensity. BK7 glass and Si02/Si thin film are ultilized to evaluate this technique.

Original language	English
Pages (from-to)	5016-5019
Number of pages	4
Journal	Japanese journal of applied physics
Volume	34
Issue number	9R
DOIs	https://doi.org/10.1143/JJAP.34.5016
State	Published - Sep 1995

Keywords

Ellipsometry
Polarimetry
Refractive index
Thin film

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10.1143/JJAP.34.5016

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title = "Ellipsometric measurements and its alignment: Using the intensity ratio technique",

abstract = "Using first-order treatment on azimuth errors of the polarizer (P) and analyzer (A) with respect to the plane of incidence (POI), we construct two intensity ratios around a certain configuration, such as P= ±п/4 and A = 0 as compared to A = п/2. These expressions can be used not only to align the azimuths of the polarizer and analyzer to the POI, but also to obtain the ellipsometric parameter Ψ without locating the minimum intensity. BK7 glass and Si02/Si thin film are ultilized to evaluate this technique.",

keywords = "Ellipsometry, Polarimetry, Refractive index, Thin film",

author = "{Chao Yschao}, {Yu Faye} and Wei, {Chi Shin} and Lee, {Wen Chi} and Lin, {Shy Chaung} and Tien-Sheng Chao",

year = "1995",

month = sep,

doi = "10.1143/JJAP.34.5016",

language = "English",

volume = "34",

pages = "5016--5019",

journal = "Japanese journal of applied physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Ellipsometric measurements and its alignment

T2 - Using the intensity ratio technique

AU - Chao Yschao, Yu Faye

AU - Wei, Chi Shin

AU - Lee, Wen Chi

AU - Lin, Shy Chaung

AU - Chao, Tien-Sheng

PY - 1995/9

Y1 - 1995/9

N2 - Using first-order treatment on azimuth errors of the polarizer (P) and analyzer (A) with respect to the plane of incidence (POI), we construct two intensity ratios around a certain configuration, such as P= ±п/4 and A = 0 as compared to A = п/2. These expressions can be used not only to align the azimuths of the polarizer and analyzer to the POI, but also to obtain the ellipsometric parameter Ψ without locating the minimum intensity. BK7 glass and Si02/Si thin film are ultilized to evaluate this technique.

AB - Using first-order treatment on azimuth errors of the polarizer (P) and analyzer (A) with respect to the plane of incidence (POI), we construct two intensity ratios around a certain configuration, such as P= ±п/4 and A = 0 as compared to A = п/2. These expressions can be used not only to align the azimuths of the polarizer and analyzer to the POI, but also to obtain the ellipsometric parameter Ψ without locating the minimum intensity. BK7 glass and Si02/Si thin film are ultilized to evaluate this technique.

KW - Ellipsometry

KW - Polarimetry

KW - Refractive index

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=0029371041&partnerID=8YFLogxK

U2 - 10.1143/JJAP.34.5016

DO - 10.1143/JJAP.34.5016

M3 - Article

AN - SCOPUS:0029371041

SN - 0021-4922

VL - 34

SP - 5016

EP - 5019

JO - Japanese journal of applied physics

JF - Japanese journal of applied physics

IS - 9R

ER -

Ellipsometric measurements and its alignment: Using the intensity ratio technique

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Keywords

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