@inproceedings{3006cba7f2ba4e3496e8d1671ff9f621,
title = "Electrothermal microgripper with large jaw displacement and integrated force sensors",
abstract = "This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can monitor the displacement of the microgripper jaws and also the contact force between the tips and the gripped object. A jaw motion up to 32 μm with an output sensing voltage of 49 mV and 114 mW power consumption is measured at a driving voltage of 4.5 V. The working temperature of the structure is then 177°C. The force sensitivity is 1.7 V/N and the corresponding displacement sensitivity is 1.5 kV/m. A minimum detectable displacement and a minimum detectable force of 1 nm and 770 nN are estimated, respectively.",
author = "{Chu Duc}, T. and Lau, {Gih Keong} and Creemer, {J. F.} and Sarro, {P. M.}",
year = "2008",
doi = "10.1109/MEMSYS.2008.4443707",
language = "English",
isbn = "9781424417933",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "519--522",
booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",
note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",
}