Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

  • Manu Garg
  • , Dhairya Singh Arya
  • , Sushil Kumar
  • , Khanjan Joshi
  • , Mujeeb Yousuf
  • , Yi Chiu*
  • , Pushpapraj Singh*
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Keyphrases

Engineering

Material Science