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Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range
Manu Garg, Dhairya Singh Arya, Sushil Kumar, Khanjan Joshi, Mujeeb Yousuf, Yi Chiu*, Pushpapraj Singh*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations