Electroplated Ni-CNT nanocomposite for micromechanical resonator applications

Yi Chia Lee; Ming Huang Li; Yu-Ting Cheng; Wen-Syang Hsu; Sheng Shian Li

doi:10.1109/LED.2012.2190131

Electroplated Ni-CNT nanocomposite for micromechanical resonator applications

Yi Chia Lee^*, Ming Huang Li, Yu-Ting Cheng, Wen-Syang Hsu, Sheng Shian Li

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show ∼ 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.

Original language	English
Article number	6184271
Pages (from-to)	872-874
Number of pages	3
Journal	Ieee Electron Device Letters
Volume	33
Issue number	6
DOIs	https://doi.org/10.1109/LED.2012.2190131
State	Published - 2012

Keywords

Electroplated Ni-CNT nanocomposite
microelectromechanical systems (MEMS)
quality factor
resonant frequency
resonator

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10.1109/LED.2012.2190131

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title = "Electroplated Ni-CNT nanocomposite for micromechanical resonator applications",

abstract = "In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show ∼ 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.",

keywords = "Electroplated Ni-CNT nanocomposite, microelectromechanical systems (MEMS), quality factor, resonant frequency, resonator",

author = "Lee, {Yi Chia} and Li, {Ming Huang} and Yu-Ting Cheng and Wen-Syang Hsu and Li, {Sheng Shian}",

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AU - Lee, Yi Chia

AU - Li, Ming Huang

AU - Cheng, Yu-Ting

AU - Hsu, Wen-Syang

AU - Li, Sheng Shian

PY - 2012

Y1 - 2012

N2 - In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show ∼ 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.

AB - In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show ∼ 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.

KW - Electroplated Ni-CNT nanocomposite

KW - microelectromechanical systems (MEMS)

KW - quality factor

KW - resonant frequency

KW - resonator

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M3 - Article

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JO - Ieee Electron Device Letters

JF - Ieee Electron Device Letters

IS - 6

M1 - 6184271

ER -

Electroplated Ni-CNT nanocomposite for micromechanical resonator applications

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