The investigation of the electronic and bonding structures of B-C-N thin films was carried out using X-ray absorption near-edge structure (XANES) and valence-band photoelectron spectroscopy (PES). The intensities of the sp 2-bonded features in the CK-edge XANES spectra was observed to decrease with the increase in C concentration, whereas those in the spectra of NK-edge XANES increase with the N concentration. The decrease of the intensities of the sp2-bonded features in the C and NK-edges XANES spectra was correlated with the increase of the N/B and C/B concentration ratios and the Young's modulus. It was found that the Valence-band PES spectra were insensitive to the variations of the B and C concentrations in B-C-N compounds.
|Number of pages||4|
|Journal||Journal of Applied Physics|
|State||Published - 1 Jul 2004|