Abstract
The investigation of the electronic and bonding structures of B-C-N thin films was carried out using X-ray absorption near-edge structure (XANES) and valence-band photoelectron spectroscopy (PES). The intensities of the sp 2-bonded features in the CK-edge XANES spectra was observed to decrease with the increase in C concentration, whereas those in the spectra of NK-edge XANES increase with the N concentration. The decrease of the intensities of the sp2-bonded features in the C and NK-edges XANES spectra was correlated with the increase of the N/B and C/B concentration ratios and the Young's modulus. It was found that the Valence-band PES spectra were insensitive to the variations of the B and C concentrations in B-C-N compounds.
Original language | English |
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Pages (from-to) | 208-211 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 96 |
Issue number | 1 |
DOIs | |
State | Published - 1 Jul 2004 |