Electrical transport phenomena in aromatic hydrocarbon polymer

Po-Tsun Liu*, T. C. Chang, Shuo Ting Yan, Chun Huai Li, S. M. Sze

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


Electrical transport mechanisms in a low-permittivity aromatic hydrocarbon SiLK have been characterized using metal/SiLK/Si capacitors under both thermal and electric field stressing. Two distinct transport mechanisms dominate the leakage behavior of the polymer SiLK with Al and Cu electrodes, respectively. Al-electrode capacitors show Schottky-emission (SE)-type leakage behavior while Poole-Frenkel (PF) conduction resulted from trap generation in the SiLK polymer is responsible for the leakage of Cu-electrode capacitors. The trap barrier height has been extracted from the temperature dependence of leakage current. Copper penetration into the SiLK polymer leads to the generation of trap centers and seriously deteriorates dielectric characteristics. The transition of leakage conduction from SE to PF will exponentially lead to the insulating failure of the SiLK polymer.

Original languageEnglish
JournalJournal of the Electrochemical Society
Issue number2
StatePublished - 1 Feb 2003


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