Electrical properties of metal-silicon nitride-hydrogenated amorphous silicon capacitor elucidated using admittance spectroscopy

Ming Ta Hsieh*, Jenn-Fang Chen, Kuo Hsi Yen, Hsiao-Wen Zan, Chan Ching Chang, Chih Hsien Chen, Ching Chieh Shih, Yeong Shyang Lee

*Corresponding author for this work

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