Electrical properties of metal-silicon nitride-hydrogenated amorphous silicon capacitor elucidated using admittance spectroscopy

Ming Ta Hsieh*, Jenn-Fang Chen, Kuo Hsi Yen, Hsiao-Wen Zan, Chan Ching Chang, Chih Hsien Chen, Ching Chieh Shih, Yeong Shyang Lee

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Electrical properties of metal-silicon nitride-hydrogenated amorphous silicon capacitor elucidated using admittance spectroscopy'. Together they form a unique fingerprint.

Keyphrases

Material Science