Electrical performance enhancement of a-AZTO by a low temperature Treatment

Po-Tsun Liu; Chur Shyang Fuh; Li Feng Teng; Yang Shun Fan; Chih Hsiang Chang

Electrical performance enhancement of a-AZTO by a low temperature Treatment

Po-Tsun Liu, Chur Shyang Fuh, Li Feng Teng, Yang Shun Fan, Chih Hsiang Chang

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H ₂ O molecules into films and terminate the traps in films by the oxidization.

Original language	English
Title of host publication	20th International Display Workshops 2013, IDW 2013
Publisher	International Display Workshops
Pages	358-360
Number of pages	3
ISBN (Electronic)	9781510827783
State	Published - 1 Jan 2013
Event	20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan Duration: 3 Dec 2013 → 6 Dec 2013

Publication series

Name	Proceedings of the International Display Workshops
Volume	1
ISSN (Print)	1883-2490

Conference

Conference	20th International Display Workshops 2013, IDW 2013
Country/Territory	Japan
City	Sapporo
Period	3/12/13 → 6/12/13

Keywords

AZTO
Low temperature treatment
SCF

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Electrical performance enhancement of a-AZTO by a low temperature Treatment",

abstract = " In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H 2 O molecules into films and terminate the traps in films by the oxidization. ",

keywords = "AZTO, Low temperature treatment, SCF",

author = "Po-Tsun Liu and Fuh, {Chur Shyang} and Teng, {Li Feng} and Fan, {Yang Shun} and Chang, {Chih Hsiang}",

year = "2013",

month = jan,

day = "1",

language = "English",

series = "Proceedings of the International Display Workshops",

publisher = "International Display Workshops",

pages = "358--360",

booktitle = "20th International Display Workshops 2013, IDW 2013",

note = "20th International Display Workshops 2013, IDW 2013 ; Conference date: 03-12-2013 Through 06-12-2013",

}

Liu, P-T, Fuh, CS, Teng, LF, Fan, YS & Chang, CH 2013, Electrical performance enhancement of a-AZTO by a low temperature Treatment. in 20th International Display Workshops 2013, IDW 2013. Proceedings of the International Display Workshops, vol. 1, International Display Workshops, pp. 358-360, 20th International Display Workshops 2013, IDW 2013, Sapporo, Japan, 3/12/13.

Electrical performance enhancement of a-AZTO by a low temperature Treatment. / Liu, Po-Tsun; Fuh, Chur Shyang; Teng, Li Feng et al.
20th International Display Workshops 2013, IDW 2013. International Display Workshops, 2013. p. 358-360 (Proceedings of the International Display Workshops; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Electrical performance enhancement of a-AZTO by a low temperature Treatment

AU - Liu, Po-Tsun

AU - Fuh, Chur Shyang

AU - Teng, Li Feng

AU - Fan, Yang Shun

AU - Chang, Chih Hsiang

PY - 2013/1/1

Y1 - 2013/1/1

N2 - In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H 2 O molecules into films and terminate the traps in films by the oxidization.

AB - In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H 2 O molecules into films and terminate the traps in films by the oxidization.

KW - AZTO

KW - Low temperature treatment

KW - SCF

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M3 - Conference contribution

AN - SCOPUS:85026240604

T3 - Proceedings of the International Display Workshops

SP - 358

EP - 360

BT - 20th International Display Workshops 2013, IDW 2013

PB - International Display Workshops

T2 - 20th International Display Workshops 2013, IDW 2013

Y2 - 3 December 2013 through 6 December 2013

ER -

Electrical performance enhancement of a-AZTO by a low temperature Treatment

Abstract

Publication series

Conference

Keywords

UN SDGs

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