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Electrical Characteristics of Si0.8Ge0.2p-MOSFET With TMA Pre-Doping and NH3Plasma IL Treatment
Meng Chien Lee, Nien Ju Chung, Hung Ru Lin, Wei Li Lee, Yun Yan Chung, Shin Yuan Wang, Guang Li Luo, Chao Hsin Chien*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations