Electrical and material characterization of atomic-layer-deposited Al2O3 gate dielectric on ammonium sulfide treated GaAs substrates

Chao Ching Cheng, Chao-Hsin Chien*, G. L. Luo, Ching Chih Chang, Chi Chung Kei, Chun Hui Yang, C. N. Hsiao, Tsong Pyng Perng, Chun-Yen Chang

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

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Keyphrases

Engineering

Material Science

Chemical Engineering