Elastic, mechanical, and thermal properties of nanocrystalline diamond films

J. Philip; P. Hess; T. Feygelson; J. E. Butler; S. Chattopadhyay; K. H. Chen; L. C. Chen

doi:10.1063/1.1537465

Elastic, mechanical, and thermal properties of nanocrystalline diamond films

J. Philip^*, P. Hess, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, L. C. Chen

^*Corresponding author for this work

Institute of Biophotonics

Research output: Contribution to journal › Article › peer-review

283 Scopus citations

Abstract

The elastic, mechanical, and thermal properties of nanocrystalline diamond films were investigated by using chemical vapor deposition (CVD) technique. The grain size and optical quality of the films were characterized by scanning electron microscopy and Raman measurements. The results showed that the thermal diffusivity value for the nanocrystalline film grown under high nucleation densities were 25% higher with respect to the films grown under low nucleation densities.

Original language	English
Pages (from-to)	2164-2171
Number of pages	8
Journal	Journal of Applied Physics
Volume	93
Issue number	4
DOIs	https://doi.org/10.1063/1.1537465
State	Published - 15 Feb 2003

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abstract = "The elastic, mechanical, and thermal properties of nanocrystalline diamond films were investigated by using chemical vapor deposition (CVD) technique. The grain size and optical quality of the films were characterized by scanning electron microscopy and Raman measurements. The results showed that the thermal diffusivity value for the nanocrystalline film grown under high nucleation densities were 25% higher with respect to the films grown under low nucleation densities.",

author = "J. Philip and P. Hess and T. Feygelson and Butler, {J. E.} and S. Chattopadhyay and Chen, {K. H.} and Chen, {L. C.}",

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AU - Hess, P.

AU - Feygelson, T.

AU - Butler, J. E.

AU - Chattopadhyay, S.

AU - Chen, K. H.

AU - Chen, L. C.

PY - 2003/2/15

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N2 - The elastic, mechanical, and thermal properties of nanocrystalline diamond films were investigated by using chemical vapor deposition (CVD) technique. The grain size and optical quality of the films were characterized by scanning electron microscopy and Raman measurements. The results showed that the thermal diffusivity value for the nanocrystalline film grown under high nucleation densities were 25% higher with respect to the films grown under low nucleation densities.

AB - The elastic, mechanical, and thermal properties of nanocrystalline diamond films were investigated by using chemical vapor deposition (CVD) technique. The grain size and optical quality of the films were characterized by scanning electron microscopy and Raman measurements. The results showed that the thermal diffusivity value for the nanocrystalline film grown under high nucleation densities were 25% higher with respect to the films grown under low nucleation densities.

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Elastic, mechanical, and thermal properties of nanocrystalline diamond films

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