Effects of thermal annealing on Ni/Ta/n-GaN Schottky diodes

Gin Liang Chen*, Fu Chin Chang, Wang Cheng Chung, Bohr Ran Huang, Wen Hsiung Chen, Ming Chih Lee, Wei-Kuo Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


The thermal effects of Ni/Ta/n-GaN Schottky diodes have been investigated for the first time using current-voltage, X-ray photoemission spectroscopy and Auger electron spectroscopy (AES) methods. Their barrier height is found to increase monotonously with increasing annealing temperature up to 800°C. Preliminary results indicate that when a Ta intermediate layer is added into the Ni/GaN diodes, it can prevent the metal-semiconductor interdiffusion and Ni accumulation adjacent to GaN substrate to a large extent so that a more thermally stable device can be obtained.

Original languageEnglish
Pages (from-to)L255-L258
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number3 B
StatePublished - 15 Mar 2001


  • Auger electron spectroscopy
  • Ni/Ta/n-GaN


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