Effects of plasma treatments, substrate types, and crystallization methods on performance and reliability of low temperature polysilicon TFTs

C. W. Lin*, M. Z. Yang, C. C. Yeh, L. J. Cheng, T. Y. Huang, Huang-Chung Cheng, Horng-Chih Lin, Tien-Sheng Chao, C. Y. Chang

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

23 Scopus citations

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Engineering

Material Science

Chemical Engineering