Effects of N2 and O2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator- semiconductor structures

Chyuan Haur Kao; Hsiang Chen; Ming Ling Lee; Che Chun Liu; Herng Yih Ueng; Yu Cheng Chu; Ching Bang Chen; Kow-Ming Chang

doi:10.1016/j.snb.2013.12.103

Effects of N₂ and O₂ annealing on the multianalyte biosensing characteristics of CeO₂-based electrolyte-insulator- semiconductor structures

Chyuan Haur Kao, Hsiang Chen^*, Ming Ling Lee, Che Chun Liu, Herng Yih Ueng, Yu Cheng Chu, Ching Bang Chen, Kow-Ming Chang

^*Corresponding author for this work

Institute of Electronics

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

A CeO₂-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N₂ and O₂ ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na⁺, K⁺, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 C in O₂ ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N₂ ambience. Oxygen in O₂ ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O₂ annealing ambience.

Original language	English
Pages (from-to)	503-510
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	194
DOIs	https://doi.org/10.1016/j.snb.2013.12.103
State	Published - 1 Apr 2014

Keywords

CeO
Electrolyte-insulator-semiconductor
Material quality
O and N annealing
Sensing performance

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@article{b8b2418b2d2545dba5703c58ff6c9786,

title = "Effects of N2 and O2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator- semiconductor structures",

abstract = "A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N2 and O2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 C in O2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N2 ambience. Oxygen in O2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O2 annealing ambience.",

keywords = "CeO, Electrolyte-insulator-semiconductor, Material quality, O and N annealing, Sensing performance",

author = "Kao, {Chyuan Haur} and Hsiang Chen and Lee, {Ming Ling} and Liu, {Che Chun} and Ueng, {Herng Yih} and Chu, {Yu Cheng} and Chen, {Ching Bang} and Kow-Ming Chang",

year = "2014",

month = apr,

day = "1",

doi = "10.1016/j.snb.2013.12.103",

language = "English",

volume = "194",

pages = "503--510",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

}

TY - JOUR

T1 - Effects of N2 and O2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator- semiconductor structures

AU - Kao, Chyuan Haur

AU - Chen, Hsiang

AU - Lee, Ming Ling

AU - Liu, Che Chun

AU - Ueng, Herng Yih

AU - Chu, Yu Cheng

AU - Chen, Ching Bang

AU - Chang, Kow-Ming

PY - 2014/4/1

Y1 - 2014/4/1

N2 - A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N2 and O2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 C in O2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N2 ambience. Oxygen in O2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O2 annealing ambience.

AB - A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N2 and O2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 C in O2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N2 ambience. Oxygen in O2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O2 annealing ambience.

KW - CeO

KW - Electrolyte-insulator-semiconductor

KW - Material quality

KW - O and N annealing

KW - Sensing performance

UR - http://www.scopus.com/inward/record.url?scp=84893373833&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2013.12.103

DO - 10.1016/j.snb.2013.12.103

M3 - Article

AN - SCOPUS:84893373833

SN - 0925-4005

VL - 194

SP - 503

EP - 510

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

ER -

Effects of N₂ and O₂ annealing on the multianalyte biosensing characteristics of CeO₂-based electrolyte-insulator- semiconductor structures

Abstract

Keywords

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