Effects of NHβ-plasma nitridation on the electrical characterizations of low-fc hydrogen silsesquioxane with copper interconnects

Po-Tsun Liu*, Ting Chang Chang, Ya Liang Yang, Yi Fang Cheng, Simon M. Sze

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

77 Scopus citations

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Engineering & Materials Science

Chemical Compounds