Effects of metallic contaminants on the electrical characteristics of ultrathin gate oxides

Tung Ming Pan*, Fu-Hsiang Ko, Tien-Sheng Chao, Chieh Chuang Chen, Kuei Shu Chang-Liao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy