We have investigated the effects of growth temperature on the solid incorporation of AlAsSb epilayers grown by metalorganic vapor-phase epitaxy using TMA1, TBAs and TMSb as source precursors. The solid incorporation of AlAsSb was found to be strongly affected by the pyrolysis reactions and kinetics of the source precursors, in particular, TMA1 and TBAs. Our experimental results indicated that the Al incorporation efficiency increases with the growth temperature and saturates at temperatures above ∼ 625°C. On the other hand, the growth behavior of As is anomalous: the As incorporation efficiency increases initially with growth temperature, and decreases monotonously at temperatures above ∼ 550°C. The reduced As incorporation efficiency at high temperatures may be closely related to the β-elimination process of TBAs, and to the formation of adducts in the gas phase.
|Japanese Journal of Applied Physics, Part 2: Letters
|Published - 1 Oct 1996
- Incorporation efficiency