Effects of energetic particle bombardment on residual stress, microstrain and grain size of plasma-assisted PVD Cr thin films

J. H. Hsieh*, C. Li, W. Wu, R. F. Hochman

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

17 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of energetic particle bombardment on residual stress, microstrain and grain size of plasma-assisted PVD Cr thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds