Effects of Drain Field Plate Structure and Passivation Dielectrics on Breakdown Voltage of GaN MISHEMT

Catherine Langpoklakpam*, Yi Kai Hsiao, Chun Hsiung Lin, Hao Chung Kuo

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In this work, a novel D-mode GaN MISHEMT with two steps drain field plate is proposed. The designed two steps drain field plate modulates the high electric field at the drain side by spreading the electric field across the two field plates of the device thus enhancing the breakdown voltage of the device. The breakdown voltage of the device is about 1587V which is 350V more than that of the conventional GaN MISHEMT. Furthermore, it is worth noting that the adoption of the proposed design shows minimal impact on the DC characteristics of the device, ensuring its overall performance remains largely unaffected. In addition, by using high-k passivation layers the breakdown of the conventional device is improved by 20.6 % by using HfO2 and reduced by S.4 % by using SiO2 when compared with the SiN passivation layer.

Original languageEnglish
Title of host publicationWiPDA Asia 2023 - IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350337112
DOIs
StatePublished - 2023
Event2023 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia, WiPDA Asia 2023 - Hsinchu, Taiwan
Duration: 27 Aug 202329 Aug 2023

Publication series

NameWiPDA Asia 2023 - IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia

Conference

Conference2023 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia, WiPDA Asia 2023
Country/TerritoryTaiwan
CityHsinchu
Period27/08/2329/08/23

Keywords

  • Breakdown Voltage
  • Field plate
  • GaN
  • High performance
  • MISHEMT

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