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Effectiveness of Si thin buffer layer for selective SiGe epitaxial growth in recessed source and drain for pMOS
P. L. Cheng*, C. I. Liao, C. C. Chien, C. L. Yang, S. F. Ting, L. S. Jeng, C. T. Huang, Osbert Cheng, S. F. Tzou, Wen-Syang Hsu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations