Effective improvement of high-k Hf-silicate/silicon interface with thermal nitridation

C. W. Yang*, Y. K. Fang, S. F. Chen, C. Y. Lin, M. F. Wang, Y. M. Lin, Tuo-Hung Hou, L. G. Yao, S. C. Chen, M. S. Liang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


The electrical properties of polysilicon gate MOS capacitors with hafnium silicate (HfSiO) dielectric, with and without NH3 nitridation, were investigated. The results show that with NH3 nitridation prior to deposition of HfSiO can effectively tune the flatband voltage close to that of conventional oxide and significantly improve the leakage properties over SiO2 (three orders reduction). Furthermore, the excellent interface quality has been evidenced by the result of immunity against soft breakdown with NH3 nitridation.

Original languageEnglish
Pages (from-to)421-422
Number of pages2
JournalElectronics Letters
Issue number5
StatePublished - 6 Mar 2003


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