@inproceedings{e8841a78b7794d2b9861f89688d6eab7,
title = "Effect of the forming gas annealing on the Zinc Gallium Oxide based Deep UV photodetector characteristics grown by metalorganic chemical vapor deposition",
abstract = "Zinc Gallium oxide epilayer was grown on sapphire c-plane substrate by Metal organic chemical vapor deposition (MOCVD). Metal-semiconductor-metal (MSM) photodetectors were fabricated with Ni/Au Contacts. The effect of the Forming gas annealing (FGA) treatment on the Photodetector (PD) Characteristics was studied.",
keywords = "Deep ultraviolet PD, forming gas annealing, MOCVD",
author = "Siddharth Rana and Tarntair, {Fu Gow} and Singh, {Jitendra Pratap} and Horng, {Ray Hua}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 IEEE Photonics Conference, IPC 2023 ; Conference date: 12-11-2023 Through 16-11-2023",
year = "2023",
doi = "10.1109/IPC57732.2023.10360768",
language = "English",
series = "2023 IEEE Photonics Conference, IPC 2023 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2023 IEEE Photonics Conference, IPC 2023 - Proceedings",
address = "美國",
}