Keyphrases
Power Density
100%
Structural Evolution
100%
ITO Thin Film
100%
Compositional Evolution
100%
HiPIMS
100%
High Power Density
75%
ITO Film
75%
Sn Doping
50%
Oxygen Vacancy Defects
50%
Doping Efficiency
50%
Passivation
25%
Resistivity
25%
Transmittance
25%
Carrier Mobility
25%
Carrier Concentration
25%
Diffusion Length
25%
Large Grain Size
25%
Ionization Rate
25%
Passivated
25%
Density Increase
25%
Crystal Orientation
25%
Orientation Change
25%
High Excitation
25%
Migration Barrier
25%
Oxygen Species
25%
Oxygen Radicals
25%
Tin-doped Indium Oxide
25%
Initial Energy
25%
Sputtering Effect
25%
Excitation-autoionization
25%
High-Sn Content
25%
Self-sputtering
25%
Material Science
Density
100%
Thin Films
100%
Indium Tin Oxide
100%
Film
57%
Oxygen Vacancy
28%
Vacancy Defect
28%
Electrical Resistivity
14%
Oxide Compound
14%
Indium
14%
Grain Size
14%
Carrier Concentration
14%
Carrier Mobility
14%
Tin
14%
Crystal Orientation
14%
High Power Impulse Magnetron Sputtering
14%
Engineering
Thin Films
100%
Power Density
100%
Oxygen Vacancy
28%
Passivation
14%
Diffusion Length
14%
Ionization Rate
14%
Oxygen Specie
14%
Initial Energy
14%
Sn Content
14%
High Power Impulse Magnetron Sputtering
14%
Carrier Mobility
14%
Carrier Concentration
14%
Crystal Orientation
14%