Effect of power density on compositional and structural evolution of ITO thin film by HiPIMS method

Ming Jie Zhao, Jin Fa Zhang, Jie Huang, Qi Hui Huang, Wan Yu Wu, Ming Chun Tseng, Chien Jung Huang, Hao Chung Kuo, Shui Yang Lien*, Wen Zhang Zhu

*Corresponding author for this work

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Engineering & Materials Science

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