Effect of ALD-Al2O3 Passivated Silicon Quantum Dot Superlattices on p/i/n+ Solar Cells

Mohammad Maksudur Rahman, Yi Chia Tsai, Ming-Yi Lee, Akio Higo, Yi-Ming Li, Yusuke Hoshi, Noritaka Usami, Seiji Samukawa*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


The photovoltaic (PV) nature of the silicon (Si) quantum dot super lattice (QDSL) is studied with an atomiclayer-deposited aluminum oxide film (ALD-Al2O3) and a conventional sputtered-grown amorphous silicon carbide film (a-SiC). The QDSL structures act as an intermediate layer in a p/i/n+ Si solar cell. The QDSL consists of 4-nm Si on 2-nm SiC nanodisks (NDs) arrayed in an ALD-Al2O3 and a-SiC passivation matrix. Formation of Si-NDs was confirmed by bright field scanning transmission electron microscope. A significant PV response in generating a high photocurrent density Jsc of 30.15mA/cm2open circuit voltage Voc of 0.50 V, fill factor FF of 0.61, and efficiency η of 9.12% was observed in ALD-Al2O3/QDSL solar cell with respect to a-SiC/QDSL solar cell with Jsc of 26.94 mA/cm2, Voc of 0.50 V, FF of 0.47, and ? of 6.42%. A wide range of photo-carrier transports by the ALD-Al2O3/QDSL structure is possible in the external quantum efficiency spectra with respect to a-SiC/QDSL solar cell. The enhanced PV performance of the QD solar cells was clarified in terms of simulating the absorption contributions for all possible transitions in the nanostructure with different passivation films.

Original languageEnglish
Article number7935526
Pages (from-to)2886-2892
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number7
StatePublished - 1 Jul 2017


  • Passivation
  • Si/SiC heterostructure
  • silicon quantum dot super lattice (Si QDSL)
  • solar cell
  • SI


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