Fingerprint
Dive into the research topics of 'Direct patterning of low-k hydrogen silsesquioxane using x-ray exposure technology'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Direct patterning of low-k hydrogen silsesquioxane using x-ray exposure technology
T. C. Chang*, T. M. Tsai, Po-Tsun Liu, Y. S. Mor, C. W. Chen, Jeng-Tzong Sheu, Tseung-Yuen Tseng
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations