Direct laser writing of crystallized TiO ₂ and TiO ₂ /carbon microstructures with tunable conductive properties

Metal oxides are an important class of materials for optoelectronic applications. In this context, developing simple and versatile processes for integrating these materials at the microscale and nanoscale has become increasingly important. One of the major remaining challenges is to control the microstructuration and electro-optical properties in a single step. It is shown here that near-infrared femtosecond laser irradiation can be successfully used to prepare amorphous or crystallized TiO₂ microstructures in a single step using a direct laser writing (DLW) approach from a TiO₂ precursor thin film doped with a suitable dye. When laser writing is conducted under a nitrogen atmosphere, simultaneous to the crosslinking of the Ti-oxide precursor, the graphitization of the organic species embedded in the initial film is observed. In this case, a carbon network is generated within the TiO₂ matrix, which significantly increases the conductivity. Moreover, the TiO₂/C nanocomposite exhibits piezoresistive behavior that is used in a pressure sensor device. Using this route, it is possible to use DLW to fabricate microsized pressure sensors.