Direct laser writing of crystallized TiO 2 and TiO 2 /carbon microstructures with tunable conductive properties

Shang Yu Yu, Gautier Schrodj, Karine Mougin, Joseph Dentzer, Jean Pierre Malval, Hsiao-Wen Zan, Olivier Soppera*, Arnaud Spangenberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

Metal oxides are an important class of materials for optoelectronic applications. In this context, developing simple and versatile processes for integrating these materials at the microscale and nanoscale has become increasingly important. One of the major remaining challenges is to control the microstructuration and electro-optical properties in a single step. It is shown here that near-infrared femtosecond laser irradiation can be successfully used to prepare amorphous or crystallized TiO2 microstructures in a single step using a direct laser writing (DLW) approach from a TiO2 precursor thin film doped with a suitable dye. When laser writing is conducted under a nitrogen atmosphere, simultaneous to the crosslinking of the Ti-oxide precursor, the graphitization of the organic species embedded in the initial film is observed. In this case, a carbon network is generated within the TiO2 matrix, which significantly increases the conductivity. Moreover, the TiO2/C nanocomposite exhibits piezoresistive behavior that is used in a pressure sensor device. Using this route, it is possible to use DLW to fabricate microsized pressure sensors.

Original languageEnglish
Article number1805093
JournalAdvanced Materials
Volume30
Issue number51
DOIs
StatePublished - Dec 2018

Keywords

  • Conductive micropatterns
  • Femtosecond direct laser writing
  • Functional metal oxides
  • Miniaturized pressure sensors
  • TiO/carbon nanocomposites

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