Direct growth of large grain polycrystalline silicon films on aluminum-induced crystallization seed layer using hot-wire chemical vapor deposition

Bing Rui Wu, Shih Yung Lo, Dong Sing Wuu*, Sin Liang Ou, Hsin Yuan Mao, Jui Hao Wang, Ray-Hua Horng

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

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Keyphrases

Engineering

Material Science