Differential-phase optical coherence reflectometer for surface profile measurement

Huan Jang Huang, Wen-Chuan Kuo, Sheng Yi Chang, Chien Wa Ho, Chien Chou*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel reflectometer is discussed.

Original languageEnglish
Title of host publicationEuropean Conference on Biomedical Optics, ECBO 2007
PublisherOptical Society of America (OSA)
Pages 66271K1-66271K8
Number of pages8
ISBN (Print)9780819467713
DOIs
StatePublished - 17 Jun 2007
EventEuropean Conference on Biomedical Optics, ECBO 2007 - Munich, Germany
Duration: 17 Jun 200717 Jun 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceEuropean Conference on Biomedical Optics, ECBO 2007
Country/TerritoryGermany
CityMunich
Period17/06/0717/06/07

Keywords

  • Differential-phase
  • Low coherence
  • Optical coherence reflectometer
  • Optical heterodyne
  • Profilometer

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