@inproceedings{288bdcc2ab9f4cda97652678b48d3900,
title = "Differential-phase optical coherence reflectometer for surface profile measurement",
abstract = "We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2{\AA} on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel reflectometer is discussed.",
keywords = "Differential-phase, Low coherence, Optical coherence reflectometer, Optical heterodyne, Profilometer",
author = "Huang, {Huan Jang} and Wen-Chuan Kuo and Chang, {Sheng Yi} and Ho, {Chien Wa} and Chien Chou",
year = "2007",
month = jun,
day = "17",
doi = "10.1364/ECBO.2007.6627_69",
language = "English",
isbn = "9780819467713",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
pages = " 66271K1--66271K8",
booktitle = "European Conference on Biomedical Optics, ECBO 2007",
note = "European Conference on Biomedical Optics, ECBO 2007 ; Conference date: 17-06-2007 Through 17-06-2007",
}