Differential π-shaped CMUTs with improved linearity and sensitivity

Teng Chuan Cheng, Tsung Heng Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

High performance π-shaped capacitive micro-machined ultrasonic transducers (CMUTs) are presented with improved linearity and sensitivity. The π-shaped CMUT is composed of an anchor membrane, a circular piston electrode plate, and a bridging layer. The proposed differential π-shaped CMUT can provide differential output signals and further increase the sensitivity by about 6 dB. Both π-shaped CMUTs were designed and verified in a TSMC 1P6M 180nm CMOS MEMS technology. Experimental results show that the differential π-shaped CMUT not only provides superior linearity under 0-0.6 MPa pressure, but also exhibits 1.6 and 2.46 times in sensitivity compared to the conventional CMUT architecture.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509020737
DOIs
StatePublished - 25 Jul 2016
Event3rd IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016 - Nantou County, Taiwan
Duration: 27 May 201630 May 2016

Publication series

Name2016 IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016

Conference

Conference3rd IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016
Country/TerritoryTaiwan
CityNantou County
Period27/05/1630/05/16

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