@inproceedings{243ac62d9d2946ed80533c2cc8e920af,
title = "Differential π-shaped CMUTs with improved linearity and sensitivity",
abstract = "High performance π-shaped capacitive micro-machined ultrasonic transducers (CMUTs) are presented with improved linearity and sensitivity. The π-shaped CMUT is composed of an anchor membrane, a circular piston electrode plate, and a bridging layer. The proposed differential π-shaped CMUT can provide differential output signals and further increase the sensitivity by about 6 dB. Both π-shaped CMUTs were designed and verified in a TSMC 1P6M 180nm CMOS MEMS technology. Experimental results show that the differential π-shaped CMUT not only provides superior linearity under 0-0.6 MPa pressure, but also exhibits 1.6 and 2.46 times in sensitivity compared to the conventional CMUT architecture.",
author = "Cheng, {Teng Chuan} and Tsai, {Tsung Heng}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; null ; Conference date: 27-05-2016 Through 30-05-2016",
year = "2016",
month = jul,
day = "25",
doi = "10.1109/ICCE-TW.2016.7520986",
language = "English",
series = "2016 IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 IEEE International Conference on Consumer Electronics-Taiwan, ICCE-TW 2016",
address = "United States",
}