Dielectrophoretic concentrator for enhanced performance of poly-silicon nanowire field effect transistor for biosensing application

Srinivasu Valagerahally Puttaswamy*, Yi Jr Su, Shilpa Sivashankar, Shih Mo Yang, Yuh-Shyong Yang, Cheng Hsien Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Biological and medical fields have authenticated stupendous advancement in the development of biosensors and biochips. The development of highly sensitive biological sensors is need of the hour. This research work utilizes the dielectrophoretic concentrator chip with titanium (Ti) electrodes to shape the electric field, to pre-concentrate deoxyribo nucleic acid (DNA) within microfluidic channel onto nanowire region of poly-silicon nanowire field effect transistor (poly-Si NWFET). Preconcentration of biomolecules at the constriction site was demonstrated by focusing the DNA with negative dielectrophoresis (nDEP) manipulation technique. After integrating the DEP device with poly-Si NWFET, the I-V G curve was plotted to ensure n-type behavior.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1305-1308
Number of pages4
DOIs
StatePublished - 7 May 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

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