Dielectric degradation of Pt/SiO2/Si structures during thermal annealing

Bing-Yue Tsui*, Mao Chieh Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Dielectric degradation of Pt/SiO2/Si structures during thermal annealing'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering