Dielectric characteristics of low-permittivity silicate using electron beam direct patterning for intermetal dielectric applications
- Po-Tsun Liu*
- , T. C. Chang
- , T. M. Tsai
- , Z. W. Lin
- , C. W. Chen
- , B. C. Chen
- , S. M. Sze
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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