Development of micromanipulator with semiconductor strain gauge that can be used in solution for characteristics mesurment

Mitsuhiro Horade*, Osamu Tabata, Hiroaki Ito, Toshio Takayama, Dylan Tsai, Makoto Kaneko

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports the development of a fingertip device of micromanipulator which can grasp a cell, and directly measure the reactive force of a cell during grasping. We have reported the development of fingertip device made of silicon which specialized only for increasing the gripping efficiency of cell [1] [2]. In order to measure the reaction force of the cell in the culture solution during grasping, a semiconductor strain gauge with a high gauge factor for measuring small strain was embed into the fingertip device, and the semiconductor strain gauge was insulated by a layer of silicon dioxide. Structure design and process flow of a fingertip device were established, and the device was fabricated. Additionally, we successfully gripped the lateral root in solution and measurement signal.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages1007-1008
Number of pages2
ISBN (Electronic)9781510897571
StatePublished - 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan
Duration: 11 Nov 201815 Nov 2018

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume2

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Country/TerritoryTaiwan
CityKaohsiung
Period11/11/1815/11/18

Keywords

  • Cell manipulation
  • Force sensor
  • Micro manipulation
  • Micromanipulator

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