@inproceedings{1dc0eb0c185f494fa2a8ccc898c12fee,
title = "Development of micromanipulator with semiconductor strain gauge that can be used in solution for characteristics mesurment",
abstract = "This paper reports the development of a fingertip device of micromanipulator which can grasp a cell, and directly measure the reactive force of a cell during grasping. We have reported the development of fingertip device made of silicon which specialized only for increasing the gripping efficiency of cell [1] [2]. In order to measure the reaction force of the cell in the culture solution during grasping, a semiconductor strain gauge with a high gauge factor for measuring small strain was embed into the fingertip device, and the semiconductor strain gauge was insulated by a layer of silicon dioxide. Structure design and process flow of a fingertip device were established, and the device was fabricated. Additionally, we successfully gripped the lateral root in solution and measurement signal.",
keywords = "Cell manipulation, Force sensor, Micro manipulation, Micromanipulator",
author = "Mitsuhiro Horade and Osamu Tabata and Hiroaki Ito and Toshio Takayama and Dylan Tsai and Makoto Kaneko",
note = "Publisher Copyright: Copyright {\textcopyright} (2018) by Chemical and Biological Microsystems Society. All rights reserved.; 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 ; Conference date: 11-11-2018 Through 15-11-2018",
year = "2018",
language = "English",
series = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
publisher = "Chemical and Biological Microsystems Society",
pages = "1007--1008",
booktitle = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
}