Development of GaN HEMTs fabricated on silicon, silicon-on-insulator, and engineered substrates and the heterogeneous integration

Lung Hsing Hsu, Yung Yu Lai, Po Tsung Tu, Catherine Langpoklakpam, Ya Ting Chang, Yu Wen Huang, Wen Chung Lee, An Jye Tzou, Yuh Jen Cheng, Chun Hsiung Lin*, Hao-Chung Kuo, Edward Yi Chang

*Corresponding author for this work

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Engineering

Material Science

Chemical Engineering