Deterministic Assembly of Arrays of Lithographically Defined WS2 and MoS2 Monolayer Features Directly From Multilayer Sources Into Van Der Waals Heterostructures

Vu Nguyen, Hannah Gramling, Clarissa Towle, Wan Li, Der-Hsien Lien, Hyungjin Kim, Daryl C. Chrzan, Ali Javey, Ke Xu, Joel W. Ager, Hayden Taylor

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

One of the major challenges in the van der Waals (vdW) integration of two-dimensional (2D) materials is achieving high-yield and high-throughput assembly of predefined sequences of monolayers into heterostructure arrays. Mechanical exfoliation has recently been studied as a promising technique to transfer monolayers from a multilayer source synthesized by other techniques, allowing the deposition of a wide variety of 2D materials without exposing the target substrate to harsh synthesis conditions. Although a variety of processes have been developed to exfoliate the 2D materials mechanically from the source and place them deterministically onto a target substrate, they can typically transfer only either a wafer-scale blanket or one small flake at a time with uncontrolled size and shape. Here, we present a method to assemble arrays of lithographically defined monolayer WS2 and MoS2 features from multilayer sources and directly transfer them in a deterministic manner onto target substrates. This exfoliate–align–release process—without the need of an intermediate carrier substrate—is enabled by combining a patterned, gold-mediated exfoliation technique with a new optically transparent, heat-releasable adhesive. WS2/MoS2 vdW heterostructure arrays produced by this method show the expected interlayer exciton between the monolayers. Light-emitting devices using WS2 monolayers were also demonstrated, proving the functionality of the fabricated materials. Our work demonstrates a significant step toward developing mechanical exfoliation as a scalable dry transfer technique for the manufacturing of functional, atomically thin materials.
Original languageEnglish
Article number041006
Pages (from-to)1-8
Number of pages8
JournalJournal of Micro and Nano-Manufacturing
Volume7
Issue number4
DOIs
StatePublished - Dec 2019

Keywords

  • nanomanufacturing
  • van der Waals integration
  • exfoliation
  • 2D materials
  • optoelectronic
  • WS2
  • MoS2

Fingerprint

Dive into the research topics of 'Deterministic Assembly of Arrays of Lithographically Defined WS2 and MoS2 Monolayer Features Directly From Multilayer Sources Into Van Der Waals Heterostructures'. Together they form a unique fingerprint.

Cite this