Determination of ultrathin oxide thickness by subthreshold swing

Tien-Sheng Chao

doi:10.1143/JJAP.41.2904

Determination of ultrathin oxide thickness by subthreshold swing

Tien-Sheng Chao^*

^*Corresponding author for this work

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

Abstract

Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N₂O or O₂.

Original language	English
Pages (from-to)	2904-2905
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	5 A
DOIs	https://doi.org/10.1143/JJAP.41.2904
State	Published - May 2002

Keywords

NO
Oxide
Subthreshold swing
Thickness

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10.1143/JJAP.41.2904

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title = "Determination of ultrathin oxide thickness by subthreshold swing",

abstract = "Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O2.",

keywords = "NO, Oxide, Subthreshold swing, Thickness",

author = "Tien-Sheng Chao",

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AB - Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O2.

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DO - 10.1143/JJAP.41.2904

M3 - Article

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SP - 2904

EP - 2905

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 5 A

ER -

Determination of ultrathin oxide thickness by subthreshold swing

Abstract

Keywords

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