Determination of ultrathin oxide thickness by subthreshold swing

Tien-Sheng Chao*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O2.

Original languageEnglish
Pages (from-to)2904-2905
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number5 A
StatePublished - May 2002


  • NO
  • Oxide
  • Subthreshold swing
  • Thickness


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