Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

Shen Che Huang; Qiangsheng Huang; Keqi Ma; Jianhao Zhang; Yaocheng Shi; Daoxin Dai; Tien-chang Lu; Sailing He

doi:10.1109/ISNE.2015.7132036

Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

Shen Che Huang, Qiangsheng Huang, Keqi Ma, Jianhao Zhang, Yaocheng Shi, Daoxin Dai, Tien-chang Lu, Sailing He

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

Original language	English
Title of host publication	4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479942084
DOIs	https://doi.org/10.1109/ISNE.2015.7132036
State	Published - 23 Jun 2015
Event	4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015 - Taipei, Taiwan Duration: 4 May 2015 → 6 May 2015

Publication series

Name	4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015

Conference

Conference	4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015
Country/Territory	Taiwan
City	Taipei
Period	4/05/15 → 6/05/15

Keywords

gratings
nanostructure fabrication
silicon-on-insulator
subwavelength structure

Access to Document

10.1109/ISNE.2015.7132036

Cite this

Huang, S. C., Huang, Q., Ma, K., Zhang, J., Shi, Y., Dai, D., Lu, T., & He, S. (2015). Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator. In 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015 Article 7132036 (4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISNE.2015.7132036

Huang, Shen Che ; Huang, Qiangsheng ; Ma, Keqi et al. / Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator. 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015. Institute of Electrical and Electronics Engineers Inc., 2015. (4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015).

@inproceedings{7191b46eab1a4f209c4ba86853f4de3b,

title = "Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator",

abstract = "The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.",

keywords = "gratings, nanostructure fabrication, silicon-on-insulator, subwavelength structure",

author = "Huang, {Shen Che} and Qiangsheng Huang and Keqi Ma and Jianhao Zhang and Yaocheng Shi and Daoxin Dai and Tien-chang Lu and Sailing He",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015 ; Conference date: 04-05-2015 Through 06-05-2015",

year = "2015",

month = jun,

day = "23",

doi = "10.1109/ISNE.2015.7132036",

language = "English",

series = "4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015",

address = "美國",

}

Huang, SC, Huang, Q, Ma, K, Zhang, J, Shi, Y, Dai, D, Lu, T & He, S 2015, Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator. in 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015., 7132036, 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015, Institute of Electrical and Electronics Engineers Inc., 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015, Taipei, Taiwan, 4/05/15. https://doi.org/10.1109/ISNE.2015.7132036

Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator. / Huang, Shen Che; Huang, Qiangsheng; Ma, Keqi et al.
4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7132036 (4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

AU - Huang, Shen Che

AU - Huang, Qiangsheng

AU - Ma, Keqi

AU - Zhang, Jianhao

AU - Shi, Yaocheng

AU - Dai, Daoxin

AU - Lu, Tien-chang

AU - He, Sailing

PY - 2015/6/23

Y1 - 2015/6/23

N2 - The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

AB - The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

KW - gratings

KW - nanostructure fabrication

KW - silicon-on-insulator

KW - subwavelength structure

UR - http://www.scopus.com/inward/record.url?scp=84939445841&partnerID=8YFLogxK

U2 - 10.1109/ISNE.2015.7132036

DO - 10.1109/ISNE.2015.7132036

M3 - Conference contribution

AN - SCOPUS:84939445841

T3 - 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015

BT - 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015

Y2 - 4 May 2015 through 6 May 2015

ER -

Huang SC, Huang Q, Ma K, Zhang J, Shi Y, Dai D et al. Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator. In 4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7132036. (4th International Symposium on Next-Generation Electronics, IEEE ISNE 2015). doi: 10.1109/ISNE.2015.7132036

Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this