A new structure of bond pad is proposed to reduce its parasitic capacitance in a baseline CMOS process without any process modification. The proposed bond pad has a capacitance less than 50% of that in the traditional bond pad. In addition, this new bond pad also provides better bonding adhesion of 10% improvement than the traditional one. It is greatly useful for high-frequency IC's, which need a very low input capacitance.
|Number of pages||4|
|Journal||Proceedings of the Annual IEEE International ASIC Conference and Exhibit|
|State||Published - 13 Sep 2000|
|Event||Proceedings of the 13th Annual IEEE International ASIC/SOC Conference - Arlington, VA, USA|
Duration: 13 Sep 2000 → 16 Sep 2000