Design, fabrication, and control of components in MEMS-based optical pickups

Yi Chiu; Jin-Chern Chiou; Weileun Fang; Yung Jiun Lin; Mingching Wu

doi:10.1109/TMAG.2006.888402

Design, fabrication, and control of components in MEMS-based optical pickups

Yi Chiu^*, Jin-Chern Chiou, Weileun Fang, Yung Jiun Lin, Mingching Wu

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectromechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.

Original language	English
Pages (from-to)	780-784
Number of pages	5
Journal	IEEE Transactions on Magnetics
Volume	43
Issue number	2
DOIs	https://doi.org/10.1109/TMAG.2006.888402
State	Published - Feb 2007

Keywords

Actuator
Microelectromechanical systems (MEMS)
Optical pickup
Silicon on insulation (SOI)
Small form factor

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10.1109/TMAG.2006.888402

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title = "Design, fabrication, and control of components in MEMS-based optical pickups",

abstract = "Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectromechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.",

keywords = "Actuator, Microelectromechanical systems (MEMS), Optical pickup, Silicon on insulation (SOI), Small form factor",

author = "Yi Chiu and Jin-Chern Chiou and Weileun Fang and Lin, {Yung Jiun} and Mingching Wu",

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AU - Chiu, Yi

AU - Chiou, Jin-Chern

AU - Fang, Weileun

AU - Lin, Yung Jiun

AU - Wu, Mingching

PY - 2007/2

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N2 - Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectromechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.

AB - Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectromechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.

KW - Actuator

KW - Microelectromechanical systems (MEMS)

KW - Optical pickup

KW - Silicon on insulation (SOI)

KW - Small form factor

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JF - IEEE Transactions on Magnetics

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Design, fabrication, and control of components in MEMS-based optical pickups

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Keywords

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