Design, fabrication, and control of components in MEMS-based optical pickups

Yi Chiu*, Jin-Chern Chiou, Weileun Fang, Yung Jiun Lin, Mingching Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


Small-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectromechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.

Original languageEnglish
Pages (from-to)780-784
Number of pages5
JournalIEEE Transactions on Magnetics
Issue number2
StatePublished - Feb 2007


  • Actuator
  • Microelectromechanical systems (MEMS)
  • Optical pickup
  • Silicon on insulation (SOI)
  • Small form factor


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