Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate

Jin-Chern Chiou; Chia Yang Lin; Shang Wei Tsai; Wei Che Hong

doi:10.1109/ICSENS.2012.6411275

Design and fabrication of micromachined LPD-based SnO₂ gas sensor integrated TaN with micro-hotplate

Jin-Chern Chiou^*, Chia Yang Lin, Shang Wei Tsai, Wei Che Hong

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this study, the design and fabrication of a micromachined LPD-based SnO₂ gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO₂ gas sensor with TaN micro-heater to H₂S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H₂S gas and which optimal operating temperature was 250 °C.

Original language	English
Title of host publication	IEEE SENSORS 2012 - Proceedings
DOIs	https://doi.org/10.1109/ICSENS.2012.6411275
State	Published - 1 Dec 2012
Event	11th IEEE SENSORS 2012 Conference - Taipei, Taiwan Duration: 28 Oct 2012 → 31 Oct 2012

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	11th IEEE SENSORS 2012 Conference
Country/Territory	Taiwan
City	Taipei
Period	28/10/12 → 31/10/12

Access to Document

10.1109/ICSENS.2012.6411275

Cite this

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title = "Design and fabrication of micromachined LPD-based SnO2 gas sensor integrated TaN with micro-hotplate",

abstract = "In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H2S gas and which optimal operating temperature was 250 °C.",

author = "Jin-Chern Chiou and Lin, {Chia Yang} and Tsai, {Shang Wei} and Hong, {Wei Che}",

year = "2012",

month = dec,

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doi = "10.1109/ICSENS.2012.6411275",

language = "English",

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AU - Chiou, Jin-Chern

AU - Lin, Chia Yang

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AU - Hong, Wei Che

PY - 2012/12/1

Y1 - 2012/12/1

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AB - In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H2S gas and which optimal operating temperature was 250 °C.

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